Embedded Micro-detectors for EUV Exposure Control in FinFET CMOS Technology

Abstract An on-wafer micro-detector for in situ EUV (wavelength of 13.5 nm) detection featuring FinFET CMOS compatibility, 1 T pixel and battery-less sensing is demonstrated. Moreover, the detection results can be written in the in-pixel storage node for days, enabling off-line and non-destructive r...

Ful tanımlama

Kaydedildi:

Detaylı Bibliyografya
Asıl Yazarlar:	Chien-Ping Wang, Burn Jeng Lin, Pin-Jiun Wu, Jiaw-Ren Shih, Yue-Der Chih, Jonathan Chang, Chrong Jung Lin, Ya-Chin King
Materyal Türü:	Artigo
Dil:	Inglês
Baskı/Yayın Bilgisi:	SpringerOpen 2022-01-01
Seri Bilgileri:	Nanoscale Research Letters
Konular:	Extreme ultraviolet (EUV) Detectors FinFET CMOS technologies
Online Erişim:	https://doi.org/10.1186/s11671-021-03645-5
Etiketler:	Etiketle Etiket eklenmemiş, İlk siz ekleyin!

Embedded Micro-detectors for EUV Exposure Control in FinFET CMOS Technology

Benzer Materyaller