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Embedded Micro-detectors for EUV Exposure Control in FinFET CMOS Technology

Abstract An on-wafer micro-detector for in situ EUV (wavelength of 13.5 nm) detection featuring FinFET CMOS compatibility, 1 T pixel and battery-less sensing is demonstrated. Moreover, the detection results can be written in the in-pixel storage node for days, enabling off-line and non-destructive r...

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Auteurs principaux: Chien-Ping Wang, Burn Jeng Lin, Pin-Jiun Wu, Jiaw-Ren Shih, Yue-Der Chih, Jonathan Chang, Chrong Jung Lin, Ya-Chin King
Format: Artigo
Langue:Inglês
Publié: SpringerOpen 2022-01-01
Collection:Nanoscale Research Letters
Sujets:
Extreme ultraviolet (EUV)
Detectors
FinFET CMOS technologies
Accès en ligne:https://doi.org/10.1186/s11671-021-03645-5
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