The Effect of Co/TiN Interfaces on Co Interconnect Resistivity
Electron transport measurements on Co/TiN multilayers are employed to explore the effect of TiN layers on Co resistivity. For this, 50 nm thick multilayer stacks containing <i>N</i> = 1–10 individual Co layers that are separated by 1 nm thick TiN layers are sputter deposited on SiO<sub>2</sub>/Si(00...
-д хадгалсан:
| Үндсэн зохиолчид: | , , , |
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| Формат: | Artigo |
| Хэл сонгох: | Inglês |
| Хэвлэсэн: |
MDPI AG
2025-12-01
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| Цуврал: | Surfaces |
| Нөхцлүүд: | |
| Онлайн хандалт: | https://www.mdpi.com/2571-9637/8/4/89 |
| Шошгууд: |
Шошго байхгүй, Энэхүү баримтыг шошголох эхний хүн болох!
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