Role of Nitrogen and Yttrium Contents in Manufacturing (Cr, Y)N<sub>x</sub> Film Nanostructures
The high-power impulse magnetron sputtering (HiPIMS) technique was applied to deposit multilayer-like (Cr, Y)N<sub>x</sub> coatings on AISI 304L stainless steel, using pendular substrate oscillation and a Cr-Y target and varying the nitrogen flow rate from 10 to 50 sccm. The microstructure, mechanic...
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| 主要な著者: | , , , , , , , , , , |
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| フォーマット: | Artigo |
| 言語: | Inglês |
| 出版事項: |
MDPI AG
2022-07-01
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| シリーズ: | Nanomaterials |
| 主題: | |
| オンライン・アクセス: | https://www.mdpi.com/2079-4991/12/14/2410 |
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