A multi-functional MEMS resonator for simultaneously dual-mode physical sensing and ppb-level timing

Abstract The development of multifunctional MEMS resonators has long been constrained by the challenge of integrating high-sensitivity sensing and high-stability frequency referencing into a single compact device. This limitation hinders the realization of advanced microsystems for precision sensing...

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Autors principals:	Jiao Xu, Jingqian Xi, Chen Wang, Michael Kraft, Huafeng Liu, R. P. Martins, Pui-In Mak, Yuan Wang
Format:	Artigo
Idioma:	Inglês
Publicat:	Nature Publishing Group 2025-11-01
Col·lecció:	Microsystems & Nanoengineering
Accés en línia:	https://doi.org/10.1038/s41378-025-01070-7
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