A multi-functional MEMS resonator for simultaneously dual-mode physical sensing and ppb-level timing
Abstract The development of multifunctional MEMS resonators has long been constrained by the challenge of integrating high-sensitivity sensing and high-stability frequency referencing into a single compact device. This limitation hinders the realization of advanced microsystems for precision sensing...
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| Автори: | , , , , , , , |
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| Формат: | Artigo |
| Мова: | Inglês |
| Опубліковано: |
Nature Publishing Group
2025-11-01
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| Серія: | Microsystems & Nanoengineering |
| Онлайн доступ: | https://doi.org/10.1038/s41378-025-01070-7 |
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