A novel high-performance wide-range vacuum sensor based on a weak-coupling resonator
Abstract Wide-range vacuum sensors (0.1–105 Pa) are crucial for a variety of applications, particularly in semiconductor equipment. However, existing sensors often face a trade-off between measurement range and accuracy, with some offering a wide range at the expense of low accuracy, and others prov...
Gespeichert in:
| Hauptverfasser: | , , , , , , , |
|---|---|
| Format: | Artigo |
| Sprache: | Inglês |
| Veröffentlicht: |
Nature Publishing Group
2025-05-01
|
| Schriftenreihe: | Microsystems & Nanoengineering |
| Online-Zugang: | https://doi.org/10.1038/s41378-025-00937-z |
| Tags: |
Keine Tags, Fügen Sie das erste Tag hinzu!
|