A novel high-performance wide-range vacuum sensor based on a weak-coupling resonator
Abstract Wide-range vacuum sensors (0.1–105 Pa) are crucial for a variety of applications, particularly in semiconductor equipment. However, existing sensors often face a trade-off between measurement range and accuracy, with some offering a wide range at the expense of low accuracy, and others prov...
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| Principais autores: | , , , , , , , |
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| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado: |
Nature Publishing Group
2025-05-01
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| Series: | Microsystems & Nanoengineering |
| Acceso en liña: | https://doi.org/10.1038/s41378-025-00937-z |
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