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Impact of Solid Materials in the Gap Space between Driving Electrodes in a MEMS Tri-Electrode Electrostatic Actuator

MEMS electrostatic actuators can suffer from a high control voltage and a limited displacement range, which are made more prevalent by the pull-in effect. This study explores a tri-electrode topology to enable a reduction in the control voltage and explores the effect of various solid materials form...

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Principais autores: Mehdi Allameh, Byoungyoul Park, Cyrus Shafai
Format: Artigo
Sprog:Inglês
Udgivet: MDPI AG 2024-04-01
Serier:Sensors
Fag:
MEMS
electrostatic actuator
pull-in effect
microwave applications
voltage reduction
microfabrication
Online adgang:https://www.mdpi.com/1424-8220/24/9/2743
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