Lead-Free LiNbO<sub>3</sub> Thick Film MEMS Kinetic Cantilever Beam Sensor/Energy Harvester
In this paper, we present integrated lead-free energy converters based on a suitable MEMS fabrication process with an embedded layer of LiNbO<sub>3</sub>. The fabrication technology has been developed to realize micromachined self-generating transducers to convert kinetic energy into electrical ener...
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| Hoofdauteurs: | , , , , , , , , , |
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| Formaat: | Artigo |
| Taal: | Inglês |
| Gepubliceerd in: |
MDPI AG
2022-01-01
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| Reeks: | Sensors |
| Onderwerpen: | |
| Online toegang: | https://www.mdpi.com/1424-8220/22/2/559 |
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