Lead-Free LiNbO₃ Thick Film MEMS Kinetic Cantilever Beam Sensor/Energy Harvester

In this paper, we present integrated lead-free energy converters based on a suitable MEMS fabrication process with an embedded layer of LiNbO₃. The fabrication technology has been developed to realize micromachined self-generating transducers to convert kinetic energy into electrical ener...

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Autors principals:	Gabriel Barrientos, Giacomo Clementi, Carlo Trigona, Merieme Ouhabaz, Ludovic Gauthier-Manuel, Djaffar Belharet, Samuel Margueron, Ausrine Bartasyte, Graziella Malandrino, Salvatore Baglio
Format:	Artigo
Idioma:	Inglês
Publicat:	MDPI AG 2022-01-01
Col·lecció:	Sensors
Matèries:	lead-free transducers LiNbO<sub>3</sub> MEMS process energy converters
Accés en línia:	https://www.mdpi.com/1424-8220/22/2/559
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