An Electrostatic MEMS Roll-Pitch Rotation Rate Sensor with In-Plane Drive Mode
In this paper, we presented a novel electrostatic Roll/Pitch MEMS gyroscope with in-plane drive mode and out-of-plane sense mode. The proposed structure is developed based on a tuning fork gyroscope with decoupled sense mass on each tine that control the sense out-of-plane frequency. A multi-height...
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| Автори: | , , , , , , , , , |
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| Формат: | Artigo |
| Мова: | Inglês |
| Опубліковано: |
MDPI AG
2022-01-01
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| Серія: | Sensors |
| Предмети: | |
| Онлайн доступ: | https://www.mdpi.com/1424-8220/22/3/702 |
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