A cochlea bio-inspired tunable piezoelectric cantilever array MEMS microphone: comprehensive study
Abstract This study introduces a bio-inspired AlN-piezoelectric MEMS microphone that showcases a cantilever structure offering adjustable performance, fully emulating the dynamics and tunability observed in the basilar membrane of the mammalian cochlea. Through the incorporation of piezoelectric and...
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| Autores principales: | , , , , , , , , , |
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| Formato: | Artigo |
| Lenguaje: | Inglês |
| Publicado: |
Nature Publishing Group
2026-03-01
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| Colección: | Microsystems & Nanoengineering |
| Acceso en línea: | https://doi.org/10.1038/s41378-026-01232-1 |
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