Flexible Simulation Platform for Multilayer Piezoelectric MEMS Microphones with Signal-to-Noise Ratio (SNR) Evaluation
A flexible simulation platform to design new piezoelectric MEMS (micro-electro-mechanical systems) microphones with signal-to-noise ratio (SNR) evaluation is presented. The platform is made of two blocks: a multiphysical FEM model, in order to study the acoustic, mechanical and electrical behavior o...
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| Principais autores: | , |
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| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
MDPI AG
2018-11-01
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| Colecção: | Proceedings |
| Assuntos: | |
| Acesso em linha: | https://www.mdpi.com/2504-3900/2/13/862 |
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