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Characterising a Custom-Built Radio Frequency PECVD Reactor to Vary the Mechanical Properties of TMDSO Films

Plasma-polymerised tetramethyldisiloxane (TMDSO) films are frequently applied as coatings for their abrasion resistance and barrier properties. By manipulating the deposition parameters, the chemical structure and thus mechanical properties of the films can also be controlled. These mechanical prope...

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Uloženo v:
Hlavní autoři: Racim Radjef, Karyn L. Jarvis, Colin Hall, Andrew Ang, Bronwyn L. Fox, Sally L. McArthur
Médium: Artigo
Jazyk:Inglês
Vydáno: MDPI AG 2021-09-01
Edice:Molecules
Témata:
mechanical properties
PECVD
plasma polymerization
thin films
TMDSO
On-line přístup:https://www.mdpi.com/1420-3049/26/18/5621
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