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Characterising a Custom-Built Radio Frequency PECVD Reactor to Vary the Mechanical Properties of TMDSO Films

Plasma-polymerised tetramethyldisiloxane (TMDSO) films are frequently applied as coatings for their abrasion resistance and barrier properties. By manipulating the deposition parameters, the chemical structure and thus mechanical properties of the films can also be controlled. These mechanical prope...

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Principais autores: Racim Radjef, Karyn L. Jarvis, Colin Hall, Andrew Ang, Bronwyn L. Fox, Sally L. McArthur
Format: Artigo
Sprog:Inglês
Udgivet: MDPI AG 2021-09-01
Serier:Molecules
Fag:
mechanical properties
PECVD
plasma polymerization
thin films
TMDSO
Online adgang:https://www.mdpi.com/1420-3049/26/18/5621
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