Characterising a Custom-Built Radio Frequency PECVD Reactor to Vary the Mechanical Properties of TMDSO Films

Plasma-polymerised tetramethyldisiloxane (TMDSO) films are frequently applied as coatings for their abrasion resistance and barrier properties. By manipulating the deposition parameters, the chemical structure and thus mechanical properties of the films can also be controlled. These mechanical prope...

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Номзүйн дэлгэрэнгүй

Үндсэн зохиолчид:	Racim Radjef, Karyn L. Jarvis, Colin Hall, Andrew Ang, Bronwyn L. Fox, Sally L. McArthur
Формат:	Artigo
Хэл сонгох:	Inglês
Хэвлэсэн:	MDPI AG 2021-09-01
Цуврал:	Molecules
Нөхцлүүд:	mechanical properties PECVD plasma polymerization thin films TMDSO
Онлайн хандалт:	https://www.mdpi.com/1420-3049/26/18/5621
Шошгууд:	Шошго нэмэх Шошго байхгүй, Энэхүү баримтыг шошголох эхний хүн болох!