Control of a quasi-static MEMS Mirror for raster scanning projection applications

The angular motion of quasi-static micromirrors used for raster scanning projection applications is typically affected by undesired oscillations related to high-frequency resonant modes triggered by the sawtooth-like driving signal. This paper proposes a novel closed-loop tracking controller for imp...

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Bibliografski detalji

Glavni autori:	Riccardo Antonello, Roberto Oboe, Daniele D’Elia, Luca Molinari
Format:	Artigo
Jezik:	Inglês
Izdano:	Taylor & Francis Group 2024-12-01
Serija:	International Journal of Optomechatronics
Teme:	MEMS micromirrors laser beam raster scanning systems tracking control loops piezoelectric actuation piezoresistive sensing
Online pristup:	https://www.tandfonline.com/doi/10.1080/15599612.2024.2386991
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