Multi-Technique Approach for Work Function Exploration of Sc₂O₃ Thin Films

Thin films based on scandium oxide (Sc₂O₃) were deposited on silicon substrates to investigate the thickness effect on the reduction of work function. X-ray photoelectron spectroscopy (XPS), X-ray diffraction (XRD), energy dispersive X-ray reflectivity (EDXR), atomic force micr...

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Principais autores:	Alessio Mezzi, Eleonora Bolli, Saulius Kaciulis, Alessandro Bellucci, Barbara Paci, Amanda Generosi, Matteo Mastellone, Valerio Serpente, Daniele Maria Trucchi
格式:	Artigo
語言:	Inglês
出版:	MDPI AG 2023-04-01
叢編:	Nanomaterials
主題:	scandium oxide work function XPS UPS AFM XRD
在線閱讀:	https://www.mdpi.com/2079-4991/13/8/1430
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