Analysis of MEMS structures to identify their frequency response oriented to acoustic applications
Micro-ElectroMechanical Systems (MEMS) structures as well as all physical objectshave a natural frequency or frequencies at which they react with a vibration. The natural frequencies dependon both the mass and rigidity of the structure. In this paper the frequency respons...
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| Publicado no: | Superficies y vacío |
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| Principais autores: | , , , , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
Sociedad Mexicana de Ciencia y Tecnología de Superficies y Materiales A.C.
2015
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| Assuntos: | |
| Acesso em linha: | https://www.redalyc.org/articulo.oa?id=94239246003 |
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