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Analysis of threshold voltage fluctuations due to short channel and random doping effects
A two-dimensional (2-D) simulation study of short channel and random dopant effects on threshold voltage lowering and fluctuations in 90 nm MOSFET’s is presented. The systematic analysis of short channel and random dopant effects was carried out in 2-D on a scale to provide quantitative predictions....
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Published in: | Superficies y vacío |
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Main Authors: | , , , , |
Format: | Artigo |
Language: | Inglês |
Published: |
Sociedad Mexicana de Ciencia y Tecnología de Superficies y Materiales A.C.
2013
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Subjects: | |
Online Access: | https://www.redalyc.org/articulo.oa?id=94227470001 |
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