Microwave plasma steel nitriding using different H2-N2 gas mixtures
We report the plasma parameters of a microwave discharge immersed in a magnetic field (ECR type) studied as a function of the type of gas used to induce the discharge. Plasma diagnostics included a Langmuir probe, an ion energy analyzer and an optical emission spectroscopy system. Results of the dia...
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| Publicat a: | Superficies y vacío |
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| Autors principals: | , , , , |
| Format: | Artigo |
| Idioma: | Inglês |
| Publicat: |
Sociedad Mexicana de Ciencia y Tecnología de Superficies y Materiales A.C.
1999
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| Matèries: | |
| Accés en línia: | https://www.redalyc.org/articulo.oa?id=94200976 |
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