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Micro displacement measured by the grating interferometer with rings pattern

Micro displacements are measured with holographic gratings by using a grating interferometer of one order that detects the phase changes in the diffracted orders caused by movement of the grooves in the diffraction gratings. The period can be on the order of fractions of a micron, with high reproduc...

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Bibliografische gegevens
Gepubliceerd in:Revista Mexicana de Física
Hoofdauteur: A. Olivares-Perez
Formaat: Artigo
Taal:Inglês
Gepubliceerd in: Sociedad Mexicana de Física A.C. 2014
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Online toegang:https://www.redalyc.org/articulo.oa?id=57032591004
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