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Ultraprecision Real-Time Displacements Calculation Algorithm for the Grating Interferometer System
Grating interferometry is an environmentally stable displacement measurement technique that has significant potential for identifying the position of the wafer stage. A fast and precise algorithm is required for real-time calculation of six degrees-of-freedom (DOF) displacement using phase shifts of...
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| Publicat a: | Sensors (Basel) |
|---|---|
| Autors principals: | , , , , , , |
| Format: | Artigo |
| Idioma: | Inglês |
| Publicat: |
MDPI
2019
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| Matèries: | |
| Accés en línia: | https://ncbi.nlm.nih.gov/pmc/articles/PMC6566451/ https://ncbi.nlm.nih.gov/pubmed/31137790 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s19102409 |
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