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Effects of excimer laser annealing on low-temperature solution based indium-zinc-oxide thin film transistor fabrication

A Solution Based Indium-Zinc-Oxide thin-film transistor (TFT) with a field-effect mobility of 0.58 cm2 /Vs, a threshold voltage of 2.84 V by using pulse laser annealing processes. Indium-zinc-oxide (IZO) films with a low process temperature were deposited by sol-gel solution based method and KrF exc...

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Библиографические подробности
Опубликовано в: :Journal of Applied Research and Technology
Главные авторы: Chao-Nan Chen, Jung-Jie Huang
Формат: Artigo
Язык:Inglês
Опубликовано: Universidad Nacional Autónoma de México 2015
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Online-ссылка:https://www.redalyc.org/articulo.oa?id=47439895002
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