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Sample preparation method for scanning force microscopy

We present a method of sample preparation for studies of ion implantation on metal surfaces. The method, employing a mechanical mask, is specially adapted for samples analysed by Scanning Force Microscopy. It was successfully tested on polycrystallyne copper substrates implanted with phosphorus ions...

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Bibliografiske detaljer
Udgivet i:Brazilian Journal of Physics
Main Authors: I.R. Jankov, R.N. Szente, I.D. Goldman, M.N.P. Carreño, J.W. Swart, R. Landers
Format: Artigo
Sprog:Inglês
Udgivet: Sociedade Brasileira de Física 2001
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Online adgang:https://www.redalyc.org/articulo.oa?id=46413504005
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