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Surface Wettability Tuning of Acrylic Resin Photoresist and Its Aging Performance

Photoresist is the key material in the fabrication of micropatterns or microstructures. Tuning the surface wettability of photoresist film is a critical consideration in its application of microfluidics. In this work, the surface wettability tuning of acrylic resin photoresist by oxygen plasma or ul...

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Vydáno v:Sensors (Basel)
Hlavní autoři: Dou, Yingying, Li, Fahong, Tang, Biao, Zhou, Guofu
Médium: Artigo
Jazyk:Inglês
Vydáno: MDPI 2021
Témata:
On-line přístup:https://ncbi.nlm.nih.gov/pmc/articles/PMC8309867/
https://ncbi.nlm.nih.gov/pubmed/34300643
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s21144866
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