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Surface Wettability Tuning of Acrylic Resin Photoresist and Its Aging Performance

Photoresist is the key material in the fabrication of micropatterns or microstructures. Tuning the surface wettability of photoresist film is a critical consideration in its application of microfluidics. In this work, the surface wettability tuning of acrylic resin photoresist by oxygen plasma or ul...

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Detalhes bibliográficos
Publicado no:Sensors (Basel)
Main Authors: Dou, Yingying, Li, Fahong, Tang, Biao, Zhou, Guofu
Formato: Artigo
Idioma:Inglês
Publicado em: MDPI 2021
Assuntos:
Acesso em linha:https://ncbi.nlm.nih.gov/pmc/articles/PMC8309867/
https://ncbi.nlm.nih.gov/pubmed/34300643
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s21144866
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