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Analysis of Distortion Based on 2D MEMS Micromirror Scanning Projection System
To analyze the distortion problem of two-dimensional micro-electromechanical system (MEMS) micromirror in-plane scanning, this paper makes a full theoretical analysis of the distortion causes from many aspects. Firstly, the mathematical relations among the deflection angle, laser incidence angle, an...
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| Veröffentlicht in: | Micromachines (Basel) |
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| Hauptverfasser: | , , , |
| Format: | Artigo |
| Sprache: | Inglês |
| Veröffentlicht: |
MDPI
2021
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| Schlagworte: | |
| Online Zugang: | https://ncbi.nlm.nih.gov/pmc/articles/PMC8306571/ https://ncbi.nlm.nih.gov/pubmed/34357228 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi12070818 |
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