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A thin-film temperature sensor based on a flexible electrode and substrate
Accurate temperature measurements can efficiently solve numerous critical problems and provide key information. Herein, a flexible micro-three-dimensional sensor, with a combination of platinum and indium oxide to form thermocouples, is designed and fabricated by a microfabrication process to achiev...
Gorde:
| Argitaratua izan da: | Microsyst Nanoeng |
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| Egile Nagusiak: | , , , , , , , , , , |
| Formatua: | Artigo |
| Hizkuntza: | Inglês |
| Argitaratua: |
Nature Publishing Group UK
2021
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| Gaiak: | |
| Sarrera elektronikoa: | https://ncbi.nlm.nih.gov/pmc/articles/PMC8166532/ https://ncbi.nlm.nih.gov/pubmed/34094587 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1038/s41378-021-00271-0 |
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