Effect of Annealing on the Thermoelectricity Properties of the WRe26-In(2)O(3) Thin Film Thermocouples

WRe26-In(2)O(3) (WRe26 (tungsten-26% rhenium) and In(2)O(3) thermoelectric materials) thin film thermocouples (TFTCs) have been fabricated based on magnetron sputtering technology, which can be used in temperature measurement. Many annealing processes were studied to promote the sensitivity of WRe26...

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Bibliografiske detaljer
Udgivet i:Micromachines (Basel)
Main Authors: Tian, Bian, Liu, Yan, Zhang, Zhongkai, Liu, Zhaojun, Zhao, Libo, Lin, Qijing, Shi, Peng, Mao, Qi, Lu, Dejiang, Jiang, Zhuangde
Format: Artigo
Sprog:Inglês
Udgivet: MDPI 2020
Fag:
Article
Online adgang:https://ncbi.nlm.nih.gov/pmc/articles/PMC7407526/
https://ncbi.nlm.nih.gov/pubmed/32646043
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi11070664
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