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Effects of Thermal Annealing on the Properties of Zirconium-Doped Mg(x)Zn(1−X)O Films Obtained through Radio-Frequency Magnetron Sputtering
Zirconium-doped Mg(x)Zn(1−x)O (Zr-doped MZO) mixed-oxide films were investigated, and the temperature sensitivity of their electric and optical properties was characterized. Zr-doped MZO films were deposited through radio-frequency magnetron sputtering using a 4-inch ZnO/MgO/ZrO(2) (75/20/5 wt%) tar...
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| Publicado no: | Membranes (Basel) |
|---|---|
| Main Authors: | , , , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
MDPI
2021
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC8160718/ https://ncbi.nlm.nih.gov/pubmed/34065275 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/membranes11050373 |
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