Effects of Thermal Annealing on the Properties of Zirconium-Doped Mg(x)Zn(1−X)O Films Obtained through Radio-Frequency Magnetron Sputtering

Zirconium-doped Mg(x)Zn(1−x)O (Zr-doped MZO) mixed-oxide films were investigated, and the temperature sensitivity of their electric and optical properties was characterized. Zr-doped MZO films were deposited through radio-frequency magnetron sputtering using a 4-inch ZnO/MgO/ZrO(2) (75/20/5 wt%) tar...

Disgrifiad llawn

Wedi'i Gadw mewn:
Manylion Llyfryddiaeth
Cyhoeddwyd yn:Membranes (Basel)
Prif Awduron: Lin, Wen-Yen, Chien, Feng-Tsun, Chiu, Hsien-Chin, Sheu, Jinn-Kong, Hsueh, Kuang-Po
Fformat: Artigo
Iaith:Inglês
Cyhoeddwyd: MDPI 2021
Pynciau:
Article
Mynediad Ar-lein:https://ncbi.nlm.nih.gov/pmc/articles/PMC8160718/
https://ncbi.nlm.nih.gov/pubmed/34065275
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/membranes11050373
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