Influence of Alumina Addition on the Optical Properties and the Thermal Stability of Titania Thin Films and Inverse Opals Produced by Atomic Layer Deposition

TiO(2) thin films deposited by atomic layer deposition (ALD) at low temperatures (<100 °C) are, in general, amorphous and exhibit a smaller refractive index in comparison to their crystalline counterparts. Nonetheless, low-temperature ALD is needed when the substrates or templates are based on po...

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Udgivet i:Nanomaterials (Basel)
Main Authors: Waleczek, Martin, Dendooven, Jolien, Dyachenko, Pavel, Petrov, Alexander Y., Eich, Manfred, Blick, Robert H., Detavernier, Christophe, Nielsch, Kornelius, Furlan, Kaline P., Zierold, Robert
Format: Artigo
Sprog:Inglês
Udgivet: MDPI 2021
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Article
Online adgang:https://ncbi.nlm.nih.gov/pmc/articles/PMC8074236/
https://ncbi.nlm.nih.gov/pubmed/33924052
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/nano11041053
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