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Mastering of NIL Stamps with Undercut T-Shaped Features from Single Layer to Multilayer Stamps
Biomimetic structures such as structural colors demand a fabrication technology of complex three-dimensional nanostructures on large areas. Nanoimprint lithography (NIL) is capable of large area replication of three-dimensional structures, but the master stamp fabrication is often a bottleneck. We h...
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| Pubblicato in: | Nanomaterials (Basel) |
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| Autori principali: | , , , , , , , , |
| Natura: | Artigo |
| Lingua: | Inglês |
| Pubblicazione: |
MDPI
2021
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| Soggetti: | |
| Accesso online: | https://ncbi.nlm.nih.gov/pmc/articles/PMC8070167/ https://ncbi.nlm.nih.gov/pubmed/33918594 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/nano11040956 |
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