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Mastering of NIL Stamps with Undercut T-Shaped Features from Single Layer to Multilayer Stamps
Biomimetic structures such as structural colors demand a fabrication technology of complex three-dimensional nanostructures on large areas. Nanoimprint lithography (NIL) is capable of large area replication of three-dimensional structures, but the master stamp fabrication is often a bottleneck. We h...
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| Izdano u: | Nanomaterials (Basel) |
|---|---|
| Glavni autori: | , , , , , , , , |
| Format: | Artigo |
| Jezik: | Inglês |
| Izdano: |
MDPI
2021
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| Teme: | |
| Online pristup: | https://ncbi.nlm.nih.gov/pmc/articles/PMC8070167/ https://ncbi.nlm.nih.gov/pubmed/33918594 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/nano11040956 |
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