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A System in Package Based on a Piezoelectric Micromachined Ultrasonic Transducer Matrix for Ranging Applications
This paper proposes a system in package (SiP) for ultrasonic ranging composed of a 4 × 8 matrix of piezoelectric micromachined ultrasonic transducers (PMUT) and an interface integrated circuit (IC). The PMUT matrix is fabricated using the PiezoMUMPS process and the IC is implemented in the AMS 0.35...
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| Publicado no: | Sensors (Basel) |
|---|---|
| Main Authors: | , , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
MDPI
2021
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC8067833/ https://ncbi.nlm.nih.gov/pubmed/33917129 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s21082590 |
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