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An Electric Field Microsensor with Mutual Shielding Electrodes
This paper proposes an electric field microsensor (EFM) with mutual shielding electrodes. Based on the charge-induction principle, the EFM consists of fixed electrodes and piezoelectric-driving vertically-movable electrodes. All the fixed electrodes and movable electrodes work as both sensing electr...
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| Publicat a: | Micromachines (Basel) |
|---|---|
| Autors principals: | , , , , , , , |
| Format: | Artigo |
| Idioma: | Inglês |
| Publicat: |
MDPI
2021
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| Matèries: | |
| Accés en línia: | https://ncbi.nlm.nih.gov/pmc/articles/PMC8067120/ https://ncbi.nlm.nih.gov/pubmed/33810502 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi12040360 |
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