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A High Sensitivity Electric Field Microsensor Based on Torsional Resonance
This paper proposes a high sensitivity electric field microsensor (EFM) based on torsional resonance. The proposed microsensor adopts torsional shutter, which is composed of shielding electrodes and torsional beams. The movable shielding electrodes and the fixed sensing electrodes are fabricated on...
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| 出版年: | Sensors (Basel) |
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| 主要な著者: | , , , , , , |
| フォーマット: | Artigo |
| 言語: | Inglês |
| 出版事項: |
MDPI
2018
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| 主題: | |
| オンライン･アクセス: | https://ncbi.nlm.nih.gov/pmc/articles/PMC5795550/ https://ncbi.nlm.nih.gov/pubmed/29351210 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s18010286 |
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