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Strain effects on polycrystalline germanium thin films
Polycrystalline Ge thin films have attracted increasing attention because their hole mobilities exceed those of single-crystal Si wafers, while the process temperature is low. In this study, we investigate the strain effects on the crystal and electrical properties of polycrystalline Ge layers forme...
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| Pubblicato in: | Sci Rep |
|---|---|
| Autori principali: | , , |
| Natura: | Artigo |
| Lingua: | Inglês |
| Pubblicazione: |
Nature Publishing Group UK
2021
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| Soggetti: | |
| Accesso online: | https://ncbi.nlm.nih.gov/pmc/articles/PMC8050231/ https://ncbi.nlm.nih.gov/pubmed/33859279 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1038/s41598-021-87616-x |
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