The patterning toolbox FIB-o-mat: Exploiting the full potential of focused helium ions for nanofabrication

Focused beams of helium ions are a powerful tool for high-fidelity machining with spatial precision below 5 nm. Achieving such a high patterning precision over large areas and for different materials in a reproducible manner, however, is not trivial. Here, we introduce the Python toolbox FIB-o-mat f...

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Bibliografiske detaljer
Udgivet i:Beilstein J Nanotechnol
Main Authors: Deinhart, Victor, Kern, Lisa-Marie, Kirchhof, Jan N, Juergensen, Sabrina, Sturm, Joris, Krauss, Enno, Feichtner, Thorsten, Kovalchuk, Sviatoslav, Schneider, Michael, Engel, Dieter, Pfau, Bastian, Hecht, Bert, Bolotin, Kirill I, Reich, Stephanie, Höflich, Katja
Format: Artigo
Sprog:Inglês
Udgivet: Beilstein-Institut 2021
Fag:
Full Research Paper
Online adgang:https://ncbi.nlm.nih.gov/pmc/articles/PMC8042487/
https://ncbi.nlm.nih.gov/pubmed/33889477
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3762/bjnano.12.25
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