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Multi-Function Microelectromechanical Systems Implementation with an ASIC Compatible CMOS 0.18 μm Process
A multi-function microelectromechanical system (MEMS) with a three-axis magnetometer (MAG) and three-axis accelerometer (ACC) function was implemented with an application-specific integrated circuit (ASIC)-compatible complementary metal-oxide-semiconductor (CMOS) 0.18 μm process. The readout circuit...
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| Veröffentlicht in: | Micromachines (Basel) |
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| Hauptverfasser: | , , |
| Format: | Artigo |
| Sprache: | Inglês |
| Veröffentlicht: |
MDPI
2021
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| Schlagworte: | |
| Online Zugang: | https://ncbi.nlm.nih.gov/pmc/articles/PMC8002977/ https://ncbi.nlm.nih.gov/pubmed/33803035 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi12030314 |
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