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Integrating Resonator to Enhance Magnetometer Microelectromechanical System Implementation with ASIC Compatible CMOS 0.18 μm Process

In this study, a multi-function microelectromechanical system (MEMS) was integrated with a MEMS oscillator, using the resonant frequency oscillation characteristics of the oscillator to provide the Lorentz current of the magnetometer to enhance a large dynamic range of reading, which eliminates the...

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書目詳細資料
發表在:Micromachines (Basel)
Main Authors: Lin, Chih-Hsuan, Song, Chao-Hung, Wen, Kuei-Ann
格式: Artigo
語言:Inglês
出版: MDPI 2021
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在線閱讀:https://ncbi.nlm.nih.gov/pmc/articles/PMC8227563/
https://ncbi.nlm.nih.gov/pubmed/34072537
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi12060635
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