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Dry Film Photoresist-Based Microfabrication: A New Method to Fabricate Millimeter-Wave Waveguide Components

This paper presents a novel fabrication method based on dry film photoresists to realize waveguides and waveguide-based passive components operating at the millimeter-wave frequency (30–300 GHz). We demonstrate that the proposed fabrication method has a high potential as an alternative to other micr...

Täydet tiedot

Tallennettuna:
Bibliografiset tiedot
Julkaisussa:Micromachines (Basel)
Päätekijät: Farjana, Sadia, Ghaderi, Mohamadamir, Rahiminejad, Sofia, Haasl, Sjoerd, Enoksson, Peter
Aineistotyyppi: Artigo
Kieli:Inglês
Julkaistu: MDPI 2021
Aiheet:
Linkit:https://ncbi.nlm.nih.gov/pmc/articles/PMC7998478/
https://ncbi.nlm.nih.gov/pubmed/33802473
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi12030260
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