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Enhanced ferroelectric switching speed of Si-doped HfO(2) thin film tailored by oxygen deficiency
Investigations concerning oxygen deficiency will increase our understanding of those factors that govern the overall material properties. Various studies have examined the relationship between oxygen deficiency and the phase transformation from a nonpolar phase to a polar phase in HfO(2) thin films....
Guardat en:
| Publicat a: | Sci Rep |
|---|---|
| Autors principals: | , , , , , , , , |
| Format: | Artigo |
| Idioma: | Inglês |
| Publicat: |
Nature Publishing Group UK
2021
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| Matèries: | |
| Accés en línia: | https://ncbi.nlm.nih.gov/pmc/articles/PMC7973512/ https://ncbi.nlm.nih.gov/pubmed/33737670 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1038/s41598-021-85773-7 |
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