Development of Broadband High-Frequency Piezoelectric Micromachined Ultrasonic Transducer Array

Piezoelectric micromachined ultrasonic transducers (PMUT) are promising elements to fabricate a two-dimensional (2D) array with a pitch small enough (approximately half wavelength) to form and receive arbitrary acoustic beams for medical imaging. However, PMUT arrays have so far failed to combine th...

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Bibliografiske detaljer
Udgivet i:Sensors (Basel)
Main Authors: Wang, Xu-Bo, He, Le-Ming, Ma, You-Cao, Liu, Wen-Juan, Xu, Wei-Jiang, Ren, Jun-Yan, Riaud, Antoine, Zhou, Jia
Format: Artigo
Sprog:Inglês
Udgivet: MDPI 2021
Fag:
Communication
Online adgang:https://ncbi.nlm.nih.gov/pmc/articles/PMC7961902/
https://ncbi.nlm.nih.gov/pubmed/33807831
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s21051823
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