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Preparation and Properties of Crystalline IGZO Thin Films
IGZO thin films can be used as active layers of thin-film transistors and have been widely studied. However, amorphous indium gallium zinc oxide (IGZO) fabricated at room temperature is vulnerable in subsequent manufacturing processes, such as etching and sputtering; this limits IGZO thin film trans...
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| Vydáno v: | Membranes (Basel) |
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| Hlavní autoři: | , , , |
| Médium: | Artigo |
| Jazyk: | Inglês |
| Vydáno: |
MDPI
2021
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| Témata: | |
| On-line přístup: | https://ncbi.nlm.nih.gov/pmc/articles/PMC7918925/ https://ncbi.nlm.nih.gov/pubmed/33672860 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/membranes11020134 |
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