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A Novel Frequency Stabilization Approach for Mass Detection in Nonlinear Mechanically Coupled Resonant Sensors

Frequency stabilization can overcome the dependence of resonance frequency on amplitude in nonlinear microelectromechanical systems, which is potentially useful in nonlinear mass sensor. In this paper, the physical conditions for frequency stabilization are presented theoretically, and the influence...

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Vydáno v:Micromachines (Basel)
Hlavní autoři: Li, Lei, Liu, Hanbiao, Shao, Mingyu, Ma, Chicheng
Médium: Artigo
Jazyk:Inglês
Vydáno: MDPI 2021
Témata:
On-line přístup:https://ncbi.nlm.nih.gov/pmc/articles/PMC7917976/
https://ncbi.nlm.nih.gov/pubmed/33670263
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi12020178
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