Optical Monitoring of the Production Quality of Si-Nanoribbon Chips Intended for the Detection of ASD-Associated Oligonucleotides

Gas-phase etching and optical lithography were employed for the fabrication of a silicon nanoribbon chip (Si-NR chip). The quality of the so-fabricated silicon nanoribbons (Si-NRs) was monitored by optical Raman scattering spectroscopy. It was demonstrated that the structures of the Si-NRs were virt...

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Detalhes bibliográficos
Publicado no:Micromachines (Basel)
Main Authors: Malsagova, Kristina A., Pleshakova, Tatyana O., Popov, Vladimir P., Kupriyanov, Igor N., Galiullin, Rafael A., Kozlov, Andrey F., Shumov, Ivan D., Kaysheva, Anna L., Tikhonenko, Fedor V., Archakov, Alexander I., Ivanov, Yuri D.
Formato: Artigo
Idioma:Inglês
Publicado em: MDPI 2021
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Article
Acesso em linha:https://ncbi.nlm.nih.gov/pmc/articles/PMC7913754/
https://ncbi.nlm.nih.gov/pubmed/33546438
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi12020147
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