Analysis of Parametric and Subharmonic Excitation in Push-Pull Driven Disk Resonator Gyroscopes

For micro-electromechanical system (MEMS) resonators, once the devices are fabricated and packaged, their intrinsic quality factors (Q) will be fixed and cannot be changed, which seriously limits the further improvement of the resonator’s performance. In this paper, parametric excitation is applied...

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Detaylı Bibliyografya
Yayımlandı:Micromachines (Basel)
Asıl Yazarlar: Wu, Kai, Lu, Kuo, Li, Qingsong, Zhang, Yongmeng, Zhuo, Ming, Yu, Sheng, Wu, Xuezhong, Xiao, Dingbang
Materyal Türü: Artigo
Dil:Inglês
Baskı/Yayın Bilgisi: MDPI 2021
Konular:
Article
Online Erişim:https://ncbi.nlm.nih.gov/pmc/articles/PMC7825520/
https://ncbi.nlm.nih.gov/pubmed/33419169
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi12010061
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