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Modeling the Piezoelectric Cantilever Resonator with Different Width Layers
The piezoelectric cantilever resonator is used widely in many fields because of its perfect design, easy-to-control process, easy integration with the integrated circuit. The tip displacement and resonance frequency are two important characters of the piezoelectric cantilever resonator and many mode...
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| Publicado no: | Sensors (Basel) |
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| Main Authors: | , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
MDPI
2020
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC7796114/ https://ncbi.nlm.nih.gov/pubmed/33375611 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s21010087 |
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